True 3D WLP Inspection Solutions for Wafer Bumps, Balls, and Components

Koh Young America | 3D Inspection Solutions

Product Overview

About the ZenStar Wafer-Level Packaging Inspection System

The ZenStar is Koh Young’s True 3D inspection system for advanced and wafer-level packaging, measuring bumps, balls and components on 300 millimetre wafers at 14 wafers per hour. It is a semiconductor metrology system for cleanroom production, not an SMT line machine. Contact us to arrange a consultation.

Wafer-Level Measurement

The ZenStar inspects 300 millimetre wafers at 14 wafers per hour, covering roughly 450,000 bumps, balls and components per wafer — the volume that makes manual or sampled measurement impractical at wafer level.

Sub-Micron Accuracy

Z resolution of 0.10 to 0.37 microns with height accuracy under 1 micron, or ±1.5 percent at 300 microns, to a maximum inspection height of 500 microns. Camera options are 12 megapixel at 5 micron or 25 megapixel at 3.5 micron XY resolution.

Built for the Cleanroom

Rated for Class 1000 / ISO 6 cleanroom operation and qualified by major semiconductor foundries, with wafer handling, OHT and SECS/GEM options for fab integration.

Zenstar

The ZenStar has been qualified for mass production at leading semiconductor packaging companies as the most optimized True 3D inspection solution for wafer-level-packaging applications.

ZenStar

The ZenStar supports True 3D inspection of highly reflective dice with a mirror surface. Its unparalleled 2D/3D multi-modal technology combines industry-leading Moiré technology and new Koh Young proprietary optics to provide robust and stable inspection for bleeding-edge applications. With its proprietary deep learning technology, the ZenStar offers enhanced capabilities to inspect defect items like micro-cracks, foreign material, chipping, and more.

Future Technology

Our 3D Inspection Technology is allowing customers the flexibility to improve their manufacturing capabilities and output performance.

Experience

With over 20+ years of experience the electronics industry, Koh Young offers our customers a wealth of knowledge and expertise.

Customer focused

We believe in putting our customers first no matter what. Our dedicated team are on hand to provide advice and support.

Related Semiconductor Resources

Dimensional accuracy, process control, and intelligent feedback are essential pillars of modern semiconductor metrology and inspection.